UHPPM
Ultra High Purity Pressure Gauge
Reotemp UHP gauges are specially designed to meet the demanding clean room requirements of the semiconductor, pharmaceutical, environmental, and communication industries.
- Manufactured in a Clean Room
- Sealing Surfaces Electro-polished
- Wetted Surface Finish Internal: Ra<0.25μm (Ra<10μin)
- Helium Leak Tested 10-9 scc/s
- Passivated Wetted Parts
- Packaged in Nitrogen Purged and Vacuum Sealed Double Bags
- 316L SS Wetted Parts
| Standard | ASME B40.100/ EN837-1 |
| Accuracy | 1.5″ Dial: 3-2-3% Full Scale 2″ Dial: 2-1-2% Full Scale |
| Ambient Limits | -40°F/150°F |
| Process Limits | -40°F/250°F |
| Wetted Materials | Bourdon Tube: 316L SS Socket and Gland: 316L SS |
| Lens | Polycarbonate |
| Other Materials | Case: 304SS Electropolished Dial: White Aluminum, Black Letters |
| Fillable | No |
| Connections | 1/4″ Face Seal Gland Compatible VCR Fitting with Swivel Male or Female Nut |
| Cleanliness | According to SEMI/SEMATECH Requirements |
| Maximum Working Pressure | Stable = 100% of Scale Momentary = 110% of Scale |