UHPPM
Ultra High Purity Pressure Gauge
Reotemp Series UHP & HP Ultra High Purity pressure gauges are engineered for applications where contamination control is critical. Manufactured in a Class 100 clean room and built to SEMI/SEMATECH standards, these instruments meet the strict cleanliness and material requirements of the semiconductor, pharmaceutical, and specialty gas industries. Two purity levels are available, Ultra High Purity (UHP) and High Purity (HP), with wetted surfaces that are electropolished, passivated, and helium leak tested to ensure process integrity. Transmitter versions are also available, offering the same UHP construction with analog signal outputs for integration with process control systems.
- Manufactured in a Class 100 Clean Room
- Electropolished Case
- UHP Instrument: Electropolished and Passivated Wetted Surface Finish Ra<0.25μm (Ra<10μin)
- HP Gauge: Passivated Wetted Surface
- Helium Leak Tested 10-9 scc/s
- Packaged in Nitrogen Purged and Vacuum Sealed Double Bags
- 316L SS or 316L VIM/VAR Tube & Socket
- 3 Point Calibration Certificate
| Standard | ASME B40.100/ EN837-1 SEMI/SEMATECH |
| Accuracy | 1″ & 1.5″ Dial: ±3-2-3% Full Scale 2″ & 2.5″ Dial: ±2-1-2% Full Scale Transmitter: ±0.5% or ±0.25% Full Scale |
| Ambient Limits | -40°F/150°F |
| Process Limits | -40°F/250°F |
| Wetted Materials | 316L SS or 316L VIM/VAR |
| Lens | Polycarbonate or Safety Glass |
| Other Materials | Case: 304SS Electropolished Dial: White Aluminum, Black Letters |
| Fillable | No |
| Connections | 1/4 VCR Male, 1/4 VCR Female, 1.25″ C Seal, 1.25″ W Seal, 1.5″ C Seal, 1.5″ W Seal, 1/4″ NPT, or 1/4″ Weld Stub |
| Cleanliness | Cleaned for Oxygen Service |
| Environmental Protection | X & Y Case: NEMA 3X E Case & Transmitter: NEMA 4X |
| Maximum Working Pressure | Stable = 75% of Scale Momentary = 100% of Scale |
| Reed Switch Option | Field Setable Single SPST or Field Setable Double SPST |
| Transmitter Electrical Connection | M12xA (4-Pin) Female with 3 Ft Flying Leads |